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Home  >  Journal list  >  MATERIALS TRANSACTIONS  >  Vol.44  No.2 (2003)  >  pp.215-219

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Optical Properties of Au/SiO2 Nano-Composite Films Prepared by Induction-Coil-Coupled Plasma Sputtering

Bo-Ping Zhang1), Hiroshi Masumoto1), Yoshihiro Someno2) and Takashi Goto1)
1) Institute for Materials Research, Tohoku University
2) Mechatronic Devices Division 1, ALPS Electric Co. Ltd.

Au/SiO2 nano-composite thin films with 3 to 65 vol% Au were prepared by induction-coil-coupled plasma sputtering, and the effect of heat-treatment on the nano-structure and optical property of the films were investigated. The mean diameter of the Au particles in the as-deposited films was about 8 nm and increased from 10 to 30 nm after the heat treatments at 900°C. The optical absorption was greatly improved by the heat-treatment due to the increase of Au particle sizes. At the heat-treatment of 900°C, Au/SiO2 films containing 3 to 65 vol% Au showed absorption peaks at the wavelength of 540 to 560 nm, while no absorption peak was observed in the as-deposited films containing more than 12 vol% Au. The intensity of the absorption peak for the Au/SiO2 films heat treated at 900°C increased with increasing Au content, showing a maximum value around the Au content of 37 vol%.

Au/SiO2, nano-composite, thin film, plasma sputtering, optical absorption spectra

Received: September 26, 2002
Accepted: December 09, 2002 , Published online: September 06, 2005
Copyright (c) 2005 The Japan Institute of Metals



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