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Home  >  Journal list  >  Journal of the Ceramic Society of Japan  >  Vol.118  No.1380 (August) (2010)  >  pp.767-770

Journal of the Ceramic Society of Japan
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Formation of zirconia films by the aerosol gas deposition method

Eiji FUCHITA1)2), Eiji TOKIZAKI1)2) and Yoshio SAKKA2)
1) Fuchita Nanotechnology, Ltd.
2) National Institute for Materials Science

  Recently, zirconia films have attracted considerable attention because of their potential applications in solid oxide fuel cells and as thermal barrier coatings and oxygen sensors. Herein, we report that high-density zirconia films can be formed at room temperature by using the aerosol gas deposition (AGD) technique and discuss the conditions required for film formation. The experimental results indicate that the particle size and specific surface area of the zirconia powder used determine the success of film fabrication by AGD. Films are successfully formed when the mean particle size and specific surface area of the powder are in the range 2.1–3.5 µm and 4.4–6.5 m2/g, respectively.

Zirconia powder, Aerosol gas deposition, Film formation, Mean particle size, Specific surface area

Received: April 12, 2010
Accepted: May 20, 2010 , Published online: August 01, 2010
Copyright (c) 2010 The Ceramic Society of Japan



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