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Patterned Shape Memory Alloy Films
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Kiyotaka Mori1), Jian Li1), Alexander L. Roytburd1) and Manfred Wuttig1)
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1) Department of Materials Science and Engineering, University of Maryland
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The uniaxial stress field in shape memory alloy (SMA) films patterned into thin strips increases the transformation induced deflection of SMA/Si cantilever bimorphs in comparison to cantilevers with planar films. In the single phase temperature ranges T>Af, Ms and T<As, Mf (Af-austenite finish, As-austenite start, Mf-martensite finish and Ms-martensite start temperatures), where the deflection is controlled by the thermoelastic stress, the change reflects the difference between the uniaxial and biaxial stress states. In the temperature regimes As<T<Af, Mf<T<Ms, the martensitic microstructures created by uni- vs. biaxial stress fields are responsible for the difference of the cantilever deflection.
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Keyword: martensite, films, stress relief, stress state, NiTi, thermoelestic strain
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Received: November 12, 2001
Accepted: April 17, 2002 ,
Published online: September 06, 2005 |
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Copyright (c) 2005 The Japan Institute of Metals |
 Reference
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