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Home  >  Journal list  >  Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue  >  Vol.112  23. Advances in Carbon-based Materials  >  pp.S1535-S1538

Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue
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Appearance of Surface Wrinkles with Heat Treatment of Ion Implanted Polyimide Films

Yoshikazu TERANISHI1), Eiichi YASUDA1), Tomohiro KOBAYASHI2), Masato KAKIHANA1), Masahiro YOSHIMURA1), Manabu FUKUSHIMA1), Kazumasa NAKAMURA1) and Yasuhiro TANABE1)
1) Materials & Structure Laboratory, Tokyo Iinstitute of Technology
2) The Inst. of Phys. and Chem. Res. (RIKEN)

  We investigated the morphological change of Kapton derived carbon films by introduction of Ar and N ion implantation. Ar or N ions were implanted into the Kapton type Polyimide films at an energy of 100 keV with fluences ranging from 1×1012 to 1×1017 ions/cm2. Microstructural changes were examined by UV Raman spectroscopy (363.8 nm). Morphological changes on surfaces were observed with SEM and TEM. After heat-treatment at 1000°C for 30 min with a rate of 10°C/min, implanted surface with 1×1016 ions/cm2 fluences showed irregular wrinkle surfaces. Moreover, the wrinkle morphology remained and a new type of highly graphitized films with wrinkle surfaces was obtained after heat-treatment at 3000°C. No microstructural changes were observed as compared with non-implanted specimens by visible Raman spectroscopy (514.5 nm).

Ion implantations, Polyimide film, Visible Raman, Ultraviolet (UV) Raman, Carbonization, Heating rate

Received: August 04, 2003
Accepted: January 15, 2004 , Published online: September 29, 2004
Copyright (c) 2004 The Ceramic Society of Japan



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