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Home  >  Journal list  >  Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue  >  Vol.112  2. Processing and Manufacturing  >  pp.S156-S158

Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue
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Microfluidic Patterning of Ceramic Microstructures

Sung-Jin AHN1) and Jooho MOON1)
1) Department of Ceramic Engineering, Yonsei University

  Patterned ceramic structures composed of two different materials with a feature resolution in the micrometer range have been generated by microfluidic lithography. Micro-channels made of poly (dimethylsiloxane) (PDMS) were filled with well-dispersed suspensions followed by solidification upon solvent evaporation. The cross-inserted comb-type ceramic structures with 100 μm in the width were fabricated in a relatively large area of 2×2 cm2 for Al2O3 and NiO. It was found that controls of suspension characteristics and its drying play an important role in determining pattern quality. Micro-channel filling was significantly influenced by viscosity and surface tension of suspension and interfacial interaction of suspension with surfaces of the substrate and PDMS. Once filled, a proper drying condition must be met. Otherwise, the micro-channels were disconnected due to capillary stress, resulting in an incomplete pattern generation.


Keyword:
Micromolding in capillaries (MIMIC), Poly (dimethylsiloxane) (PDMS), Microfluidic lithography (μFL)

Received: August 07, 2003
Accepted: December 11, 2003 , Published online: September 29, 2004
Copyright (c) 2004 The Ceramic Society of Japan

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