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Home  >  Journal list  >  MATERIALS TRANSACTIONS  >  Vol.48  No.9 (2007)  >  pp.2340-2342

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Fabrication and Characterization of GaP Photonic Crystals for Terahertz Wave Application

Kyosuke Saito, Kei Nozawa, Tadao Tanabe1), Yutaka Oyama1), Ken Suto2), Jun-ichi Nishizawa2), Tetsuo Sasaki2) and Tomoyuki Kimura2)
1) Department of Materials Science, Graduate School of Engineering, Tohoku University
2) Semiconductor Research Institute

We have fabricated GaP two-dimensional photonic crystals (PCs) for terahertz (THz) wave generation by a reactive ion etching in Ar/Cl2 gas chemistries. We performed 75-μm-deep etching of GaP, in which Al2O3 layer is applied as a hard mask with its selectivity as high as 125. We demonstrated the THz-wave generation from the fabricated GaP slab waveguide with the PC structure as a cladding layer under a collinear phase-matched difference frequency generation. In the frequency dependence of THz output power for the PC slab waveguide is seen at around 1.1 THz. From the in-plane transmission spectrum of THz-wave, we confirmed that the THz output characteristics had relation with the photonic structure for THz wave.

Terahertz-wave, GaP, Photonic crystal, optical waveguide, phonon-polariton, collinear phase matching

Received: April 24, 2007
Accepted: May 21, 2007 , Published online: August 25, 2007
Copyright (c) 2007 The Japan Institute of Metals



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