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Home  >  Journal list  >  MATERIALS TRANSACTIONS  >  Vol.49  No.6 (2008)  >  pp.1333-1337

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Corrosion Protect DLC Coating on Steel and Hastelloy

Hironobu Miya1) and Jie Wang1)
1) Semiconductor Equipment Division, Hitachi Kokusai Electric Inc.

The electrochemical behaviors of coating films on the steel and Ni–Cr–Mo alloy (Hastelloy) were investigated to obtain fundamental data on their corrosion resistance characteristics. We compared several types of materials and coating layers. SUS316, Hastelloy, DLC (Diamond-like carbon) on SUS316 and DLC on Hastelloy samples showed stable potential-time characteristics. F2 processing SUS316 and F2 processing Hastelloy samples showed negative direction change of the potential, and an active dissolution peak appeared in the F2 processing SUS316 samples. On the other hand, DLC samples on SUS316 and Hastelloy showed a small anode current. It appeared that DLC coating was a superior resistance layer for the corrosion.

diamond-like carbon (DLC), coating, chamber cleaning, potentiodynamic polarization

Received: December 03, 2007
Accepted: February 27, 2008 , Published online: May 25, 2008
Copyright (c) 2008 The Japan Institute of Metals



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