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Home  >  Journal list  >  Journal of the Ceramic Society of Japan  >  Vol.118  No.1375 (March) (2010)  >  pp.193-196

Journal of the Ceramic Society of Japan
<<Previous article Vol.118  No.1375 (March) (2010)   pp.193 - 196 Next article>>

Development of ZnO-based surface plasmon resonance gas sensor and analysis of UV irradiation effect on NO2 desorption from ZnO thin films

Ken WATANABE1), Kenji MATSUMOTO1), Takeshi OHGAKI1), Isao SAKAGUCHI2), Naoki OHASHI2), Shunichi HISHITA1) and Hajime HANEDA1)
1) Sensor Materials Center, National Institute for Materials Science
2) Optical Materials Center, National Institute for Materials Science

  In order to perform a high throughput exploration of sensor materials using surface plasmon resonance (SPR), the gas sensing property of a ZnO/Au/SiO2 chip with SPR and the enhancing effect of UV irradiation on the desorption rate of NO2 from the ZnO surface were investigated. When the ZnO/Au/SiO2 chip was exposed to a high concentration of NO2 (1000 ppm), a large peak shift was observed in the SPR curve. However, this sensing signal for NO2 gas did not recover to the baseline. In the case of low-concentration NO2 (10 ppm), the peak shift of the SPR curve was lower than that in the case of the high-concentration gas, but recovery to the baseline was observed. From the X-ray photoelectron spectra for N 1s of the ZnO thin films exposed to 1000- and 10-ppm NO2, two chemisorption states—NO2- (403.7 eV) and NO3- (407 eV)—were confirmed. After the ZnO film was irradiated by UV rays, exposed to 10-ppm NO2, all peaks related to N 1s disappeared. However, in the case of the ZnO film exposed to 1000-ppm NO2, adsorbed NO3- remained on the surface of ZnO. From these results, it was found that UV irradiation effectively assisted NO2 desorption from the surface of the ZnO thin film exposed to 10-ppm NO2.

Suraface plasmon resonance, Gas sensor, ZnO, NO2 desorption, UV irradiation

Received: November 26, 2009
Accepted: January 15, 2010 , Published online: March 01, 2010
Copyright (c) 2010 The Ceramic Society of Japan



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