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Home  >  Journal list  >  MATERIALS TRANSACTIONS  >  Vol.52  No.3 (2011)  >  pp.292-296

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FIB Induced Damage Examined with the Low Energy SEM

Šárka Mikmeková1)2), Kenji Matsuda3), Katsumi Watanabe2), Susumu Ikeno3), Ilona Müllerová1) and Ludek Frank1)
1) Institute of Scientific Instruments of the ASCR, v.v.i.
2) Graduate School of Science and Engineering for Education, University of Toyama
3) Graduate School of Science and Engineering for Research, University of Toyama

The surface morphology of pure Mg was studied by means of the cathode lens mode equipped scanning low energy electron microscope after bombarding with Ga+ ions at various energies (10, 20, 30, and 40 keV) and incident angles (0°, 30°, 45°, and 60°). In accordance with the Bradley-Harper theory at off-normal angles of incidence ripples were observed on the irradiated areas. The Monte Carlo program SRIM2008 was used to estimate the sputtering yield and damage depth.

scanning low energy electron microscopy, focused ion beam, beam induced damage, sputtering

Received: September 06, 2010
Accepted: November 09, 2010 , Published online: February 25, 2011
Copyright (c) 2011 The Japan Institute of Metals



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