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Home  >  Journal list  >  Journal of the Ceramic Society of Japan  >  Vol.121  No.1410 (February) (2013)  >  pp.187-194

Journal of the Ceramic Society of Japan
<<Previous article Vol.121  No.1410 (February) (2013)   pp.187 - 194 Next article>>

Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD

Toshiki TSUBOTA1), Hiroshi AMANO1), Taiki KOJO1), Naoya MURAKAMI1), Teruhisa OHNO1)
1) Department of Applied Chemistry, Faculty of Engineering, Kyushu Institute of Technology

Diamond film and ultrananocrystalline diamond (UNCD) film were synthesized on BeCu alloy substrate by using hot filament CVD apparatus. We succeed in the synthesis of diamond film and Boron-doped electrically conductive diamond film on the substrate. Moreover, UNCD film was successfully synthesized by the CVD apparatus, although this film was not electrically conductive electrically conductive. At the first stage of the CVD process for UNCD, needle-shape deposits appeared. A two-step process, that is, the synthesis of UNCD and then boron-doped diamond, was effective for the synthesis of the electrically conductive diamond film having smooth surface.

CVD diamond, Ultrananocrystalline diamond, Hot filament CVD, BeCu alloy, Electrically conductive diamond

Received: August 20, 2012
Accepted: October 25, 2012 , Published online: February 01, 2013
Copyright © 2013 The Ceramic Society of Japan



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