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Home  >  Journal list  >  Journal of the Ceramic Society of Japan  >  Vol.121  No.1411 (March) (2013)  >  pp.273-277

Journal of the Ceramic Society of Japan
<<Previous article Vol.121  No.1411 (March) (2013)   pp.273 - 277 Next article>>

Stress state analysis of stress engineered BaTiO3 thin film by LaNiO3 bottom electrode

Kohei MURAKOSHI1), Kohei FUKAMACHI1), Naonori SAKAMOTO1), Tomoya OHNO2), Takanori KIGUCHI3), Takeshi MATSUDA2), Toyohiko KONNO3), Naoki WAKIYA1), Hisao SUZUKI4)
1) Department of Materials Science and Chemical Engineering, Shizuoka University 2) Department of Material Science, Kitami Institute of Technology 3) Institute for Materials Research, Tohoku University 4) Graduate School of Materials Science and Technology, Shizuoka University

Ferroelectric materials with excellent performance without containing lead has been desired for saving human body from a harmful element, lead. The authors have reported BaTiO3 (BTO) thin films with enhanced ferroelectricity by stress engineering by thermal stress assisted by LaNiO3 (LNO) bottom electrodes. In the present study, we investigate the local stress state of the BTO and LNO films using TEM techniques. TEM observation reveals that the LNO film is porous structure whereas the BTO film is dense. Electron diffraction and dark field images of the films also reveal that the BTO and LNO films oriented along [001] and [100] directions perpendicular to the film plane, respectively. Another effect on the stressed BTO films, increased Curie temperature owing to the stabilized tetragonal phase, is also reported.

BaTiO3, LaNiO3, Stress engineering, TEM, Thin film

Received: August 22, 2012
Accepted: January 24, 2013 , Published online: March 01, 2013
Copyright © 2013 The Ceramic Society of Japan



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