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Home  >  Journal list  >  Journal of the Ceramic Society of Japan  >  Vol.122  No.1426 (June) (2014)  >  pp.410-414

Journal of the Ceramic Society of Japan
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Effects of dielectric film surface on oxygen diffusion

Jumpei SUZUKI1), Kenji MATSUMOTO1), Minoru RYU1), Yoshiki IWAZAKI1), Toshimasa SUZUKI1), Ken WATANABE2), Minako HASHIGUCHI2), Isao SAKAGUCHI2), Naoki OHASHI2)
1) Taiyo Yuden Co., LTD. Research and Development Laboratory 2) National Institute for Materials Science

The oxygen diffusivity in BaTiO3 thin films heteroepitaxially grown on SrTiO3 substrates was investigated using a gas/solid exchange technique with 18O-isotope-enriched gas. Deformation of the BaTiO3 lattice and inhibition of the oxygen diffusivity occurred simultaneously when the YSZ layer, which is assumed to be catalytic for the 18O/16O exchange reaction, was deposited on BaTiO3. The mechanism for the reduction in oxygen diffusivity due to the YSZ cover layer is discussed in terms of residual stress in the strained BaTiO3 layer.

Oxygen diffusion, Secondary ion mass spectrometry, Oxygen vacancy, Dislocation, Deformation, Barium titanate, Lattice constant

Received: December 14, 2013
Accepted: January 29, 2014 , Published online: June 01, 2014
Copyright © 2014 The Ceramic Society of Japan



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