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Home  >  Journal list  >  Journal of the Ceramic Society of Japan  >  Vol.122  No.1426 (June) (2014)  >  pp.415-420

Journal of the Ceramic Society of Japan
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Fabrication of La1−xSrxMnO3 thin films by chemical solution deposition for high-temperature resistive materials

Kentaro SHINODA1), Tomohiko NAKAJIMA1), Tetsuo TSUCHIYA1)
1) Flexible Chemical Coating Group, Advanced Manufacturing Research Institute (AMRI), National Institute of Advance Industrial Science and Technology (AIST)

Epitaxial thin films of heavily doped perovskite manganite (La1−xSrxMnO3 or LSMO with x ≥ 0.5) were successfully fabricated onto SrTiO3(001) single crystal substrates by chemical solution deposition. The electrical resistivity and the Hall coefficient were measured from 200 to 673 K. The temperature coefficient of resistance reached a minimum at 0.6 ≤ x ≤ 0.7. A high-temperature stability test showed that the LSMO thin films could be used up to 673 K. This study has shown that LSMO thin films are good candidates as high-temperature resistive materials that can be used in SiC power electronics.

LSMO, MOD, SiC power electronics, Resistive materials

Received: December 16, 2013
Accepted: February 04, 2014 , Published online: June 01, 2014
Copyright © 2014 The Ceramic Society of Japan



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