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Home  >  Journal list  >  Journal of the Ceramic Society of Japan  >  Vol.122  No.1428 (August) (2014)  >  pp.638-641

Journal of the Ceramic Society of Japan
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Effects of N2/Ar gas ratio on phase formation and tribology of Ti–Si–N composite coatings prepared by hybrid PVD

Chan-Young PARK1), Sung-Min LEE1), Seong-Won KIM1), Hyung-Tae KIM1), Byung Koog JANG2), Yoon-Suk OH1)
1) Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology 2) High Temperature Materials Unit, National Institute for Materials Science

Ti–Si–N hard coatings have been fabricated at different N2/Ar gas ratio (N2:Ar = 1:1, 1:2, or 1:3) sputtering conditions by the hybrid Physical Vapor Deposition (PVD) method, which consists of sputtering and arc ion plating (AIP). The pure silicon and titanium targets were selected for reactive sputtering and the AIP process, respectively. Field Emission Scanning Electron Microscopy (FESEM) and Energy Dispersive X-ray Spectroscopy (EDS) analysis has shown that the Ti/Si ratio increased as the Ar gas flow rate increased. Moreover, it found that the main growth plane of Ti–Si–N film was changed from (111) plane to (220) plane with increasing Ar gas flow from the results of X-ray diffraction (XRD) analysis. The wear rate of composite films was found to be lower than that of monolithic TiN with different friction coefficients at the initial running-in stage.

Ti–Si–N, Hard coating, Tribology, Hybrid PVD, N2/Ar gas ratio

Received: March 07, 2014
Accepted: June 11, 2014 , Published online: August 01, 2014



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