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Home  >  Journal list  >  Journal of the Ceramic Society of Japan ( 2003 - 2007 )  >  Vol.114  No.1329 (May) (2006)  >  pp.411-414

Journal of the Ceramic Society of Japan ( 2003 - 2007 )
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Microstructure and Stress-Induced Phase Transformation of Sol-Gel Derived Zirconia Thin Films

Yutaka OHYA1), Hiroki ISHIKAWA1) and Takayuki BAN1)
1) Department of Materials Science and Technology, Faculty of Engineering, Gifu University

  Zirconium oxide thin films were fabricated using a sol-gel method. The sols were prepared using zirconium alkoxide and acetate. An alcoholic solution of the alkoxide and an aqueous solution of the acetate were dip-coated on a glass substrate and fired at 600°C. Both films were crystallized as the tetragonal phase, which was detected by an XRD and an electron beam diffraction of an ion-thinned section. On the other hand, the electron beam diffraction of the thin section of the film prepared by crushing in a mortar, exhibited the monoclinic phase, which was transformed by stresses applied during sample preparation for TEM. The SEM observation showed a grain size of 30-50 nm. The TEM micrographs exhibited contrasts of less than 10 nm size in a single grain of about 30 nm.

Zirconia, Thin film, Microstructure, Sol-gel method, Stress-induced transformation

Received: February 13, 2006
Accepted: April 19, 2006 , Published online: May 01, 2006
Copyright (c) 2006 The Ceramic Society of Japan



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