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Home  >  Journal list  >  MATERIALS TRANSACTIONS  >  Vol.47  No.2 (2006)  >  pp.255-258

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Characterization and Permeation of Microfabricated Palladium Membrane

Yi Zhang1), Jian Lu1), Tsuyoshi Ikehara1), Ryutaro Maeda1) and Chikashi Nishimura2)
1) Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)
2) Ecomaterials Center, National Institute for Materials Science

Single-layer Pd membrane with the thickness of about 2.5 μm was successfully prepared by microfabrication technology. Hydrogen permeation of the as-prepared Pd membrane was investigated in the temperature range of 473–673 K under hydrogen transmembrane pressure of ∼40 kPa. Hydrogen permeation of Pd membrane with the thickness of 0.70 mm was also carried out for comparisons. It was found that the hydrogen permeability of the 2.5 μm-thick Pd membrane was about half of that of the 0.7 mm-thick Pd membrane. Surface resistance was less significant in hydrogen permeation through the thin microfabricated Pd membrane than thin Pd membranes supported by porous materials. Grain growth was observed in the thin microfabricated Pd membrane upon hydrogen permeation.

palladium, membrane, hydrogen permeation

Received: October 21, 2005
Accepted: December 19, 2005 , Published online: February 17, 2006
Copyright (c) 2006 The Japan Institute of Metals



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